1. Home
  2. Analytical Systems
  3. XPS/ESCA

XPS/ESCA

01 Overview

FlexMod

Flexible Modular Analysis System

The FlexMod system concept provides the scientist with an optimized and yet still customized configurable solution for a variety of surface science techniques. The system allows you to start with a basic configuration and expand with upgrade options for higher performance and additional surface science methods. This means the system can grow with you and your needs.

The individual modules are designed for optimized functionality for the chosen method. Within the module it is possible to choose from a large number of components for analysis. In addition we offer several choices for pumping configuration and sample manipulation which allow you to adapt the system to your needs. Individual modules can be operated as standalone systems or be combined to multi-method system configurations.

02 Features

Flexible and Modular Surface Analysis System Design

Optimized Analysis Modules for Spectroscopy, Microscopy and Sample Preparation

Multi-Method System Capabilities

Easy and Cost Effective Upgrade Options

Available configurations for ESCA, XPS, ARXPS, ARPES, UPS, AES, SAM, ISS

SPECS has developed a dedicated chamber module design for atomically resolved STM and AFM in UHV conditions.

For in situ sample preparation SPECS offers an optimized and versatile chamber module solution.

03 Applications

ESCA/XPS/ARXPS

The high resolution capability of the PHOIBOS analyzer combined with the FOCUS 500 monochromator and the flood gun FG 15/40 has been demonstr ated by XPS measurements on a PET (polyethylene terephthalate) surface.

In the analysis of polymeric surfaces, monochromatic sources offer a significant advantage over non-monochromatic sources due to the improved resolution. This allows to distinguish even small energy shifts which are caused by different bonding.

When using monochromatic X-rays however, spectra can be difficult to obtain due to surface charging effects when analyzing non conducting organic materials. In order to record high quality data under these circumstances, it is necessary to neutralize surface charging carefully.

The FG 15/40 is a compact, easy to handle, reliable flood gun for charge neutralization. The C1s spectrum above shows the ability to distinguish carbon atoms 1, 2 and 3 with a FWHM of 0.8 eV.

UPS/ARPES

The high resolution capability of the PHOIBOS analyzer combined with the FOCUS 500 monochromator and the flood gun FG 15/40 has been demonstrated by XPS measurements on a PET (polyethylene terephthalate) surface.

In the analysis of polymeric surfaces, monochromatic sources offer a significant advantage over non-monochromatic sources due to the improved resolution. This allows to distinguish even small energy shifts which are caused by different bonding.

When using monochromatic X-rays however, spectra can be difficult to obtain due to surface charging effects when analyzing non conducting organic materials. In order to record high quality data under these circumstances, it is necessary to neutralize surface charging carefully.

The FG 15/40 is a compact, easy to handle, reliable flood gun for charge neutralization. The C1s spectrum above shows the ability to distinguish carbon atoms 1, 2 and 3 with a FWHM of 0.8 eV.

AES/SEM/SAM

Secondary Electron Microscopy (SEM) images of Sn balls on graphite. Size 5 nm -30 μm

Depth Profiling and ISS/LEIS

Secondary Electron Microscopy (SEM) images of Sn balls on graphite. Size 5 nm -30 μm

04 Catalogue

Sections
Product Categories